NCI Southwest

The ASU NanoFab offers a flexible foundry capability maintained by the Fulton Schools of Engineering for ASU faculty and students, as well as external users from academia, industry and national laboratories. The NanoFab comprises a 4,000 sq. ft. cleanroom and associated laboratories for the fabrication and characterization of a wide range of materials (e.g. silicon, compound semiconductors, carbon nanotubes, graphene etc.) that range in size from small pieces to 8 inch wafers. The laboratories house a full suite of tools for the deposition and etching of thin films, optical and electron beam lithography (with sub-20nm resolution) and optical and electrical characterization. A staff of eight full-time engineers is experienced in process development for semiconductor devices, micro-electro-mechanical-systems (MEMS), bio-nano-sensors, and other custom applications.