ASU NanoFab


Engineering Research Center
551 E. Tyler Mall
Tempe, Arizona 85287



Kevin Hilgers
(480) 965-5256


The ASU NanoFab offers a flexible foundry capability maintained by the Fulton Schools of Engineering for ASU faculty and students, as well as external users from academia, industry and national laboratories. The NanoFab comprises a 4,000 sq. ft. cleanroom and associated laboratories for the fabrication and characterization of a wide range of materials (e.g. silicon, compound semiconductors, carbon nanotubes, graphene etc.) that range in size from small pieces to 8 inch wafers. The laboratories house a full suite of tools for the deposition and etching of thin films, optical and electron beam lithography (with sub-20nm resolution) and optical and electrical characterization. A staff of eight full-time engineers is experienced in process development for semiconductor devices, micro-electro-mechanical-systems (MEMS), bio-nano-sensors, and other custom applications.

Available Resources

As well as providing access to state-of-the-art micro- and nano-fabrication capabilities, the ASU NanoFab also supports educational activities including undergraduate and graduate classes, remote access to scanning electron microscopy for community college and high school classes, and tours of our laboratories for local schools. As part of the NCI-SW the NanoFab facilities are available for research experience programs for undergraduates and faculty at local high schools and community colleges. To find out more about how the NanoFab can support your educational and R&D needs please con